The erosion behaviors of Y2O3 and YF3 coatings under fluorocarbon plasma

  • Dae Min Kim
  • , Yoon Suk Oh
  • , Seongwon Kim
  • , Hyung Tae Kim
  • , Dae Soon Lim
  • , Sung Min Lee*
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    95 Citations (Scopus)

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    Keyphrases

    Engineering

    Material Science

    Chemical Engineering