The Fabrication and Experimental Results of a New Lateral Trench Electrode IGBT with a p+ Diverter

A new Lateral Trench Electrode Insulated Gate Bipolar Transistor (LTEIGBT) with a p+ diverter was proposed and fabricated to improve the electrical characteristics of the conventional LTIGBT. The p+ diverter was placed between anode and cathode electrodes. Because the p+ diverter region of the proposed device was enclosed trench oxide layer, the electric field centered trench-oxide layer, and punch through breakdown of LTEIGBT with p+ diverter was occurred at the high breakdown voltage. Therefore, the p+ diverter of the proposed LTIGBT didn't relate to breakdown voltage in a different way the conventional LTIGBT. As a results of device simulation, the electrical characteristics of the proposed LTEIGBT including latching current density, breakdown voltage and switching speed was superior to conventional devices. After simulation was finished, we fabricated and analyzed the proposed LTEIGBT with a p+ diverter. The maximum current of the proposed device and conventional device were 90 mA and 70 mA, respectively. Therefore, The proposed LTEIGBT with a p+ diverter is effective device for smart power IC.