The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee, Dae Soon Lim, Steven Danyluk

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	651-653
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	3
Issue number	7
DOIs	https://doi.org/10.1007/BF00719638
Publication status	Published - 1984 Jul

ASJC Scopus subject areas

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