The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee; Dae Soon Lim; Steven Danyluk

doi:10.1007/BF00719638

The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee, Dae Soon Lim, Steven Danyluk

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	651-653
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	3
Issue number	7
DOIs	https://doi.org/10.1007/BF00719638
Publication status	Published - 1984 Jul
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)

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title = "The influence of fluids on the microhardness of single crystal silicon",

author = "Lee, {Soo Wohn} and Lim, {Dae Soon} and Steven Danyluk",

year = "1984",

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doi = "10.1007/BF00719638",

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volume = "3",

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journal = "Journal of Materials Science Letters",

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AU - Lim, Dae Soon

AU - Danyluk, Steven

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JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 7

ER -

The influence of fluids on the microhardness of single crystal silicon

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