The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee; Dae Soon Lim; Steven Danyluk

doi:10.1007/BF00719638

The influence of fluids on the microhardness of single crystal silicon

Soo Wohn Lee^*, Dae Soon Lim, Steven Danyluk

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	651-653
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	3
Issue number	7
DOIs	https://doi.org/10.1007/BF00719638
Publication status	Published - 1984 Jul

ASJC Scopus subject areas

General Materials Science

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@article{f876a5794a2543f7a292c67d7c1657dc,

title = "The influence of fluids on the microhardness of single crystal silicon",

author = "Lee, \{Soo Wohn\} and Lim, \{Dae Soon\} and Steven Danyluk",

year = "1984",

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doi = "10.1007/BF00719638",

language = "English",

volume = "3",

pages = "651--653",

journal = "Journal of Materials Science Letters",

issn = "0261-8028",

publisher = "Chapman \& Hall",

number = "7",

}

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T1 - The influence of fluids on the microhardness of single crystal silicon

AU - Lee, Soo Wohn

AU - Lim, Dae Soon

AU - Danyluk, Steven

PY - 1984/7

Y1 - 1984/7

UR - https://www.scopus.com/pages/publications/0021466411

U2 - 10.1007/BF00719638

DO - 10.1007/BF00719638

M3 - Article

AN - SCOPUS:0021466411

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VL - 3

SP - 651

EP - 653

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 7

ER -

The influence of fluids on the microhardness of single crystal silicon

ASJC Scopus subject areas

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