Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions

Jaewoo Shim, Gwangwe Yoo, Dong Ho Kang, Woo Shik Jung, Young Chul Byun, Hyoungsub Kim, Won Tae Kang, Woo Jong Yu, Hyun Yong Yu, Yongkook Park, Jin Hong Park

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Abstract

    Here, we theoretically and experimentally investigate the impact of a high-κ layer inserted between graphene and p-Si in a graphene/Si junction. We have achieved 86-fold and 222-fold reductions in a specific contact resistivity (ρc) by inserting 1-nm-thick Al2O3 and 2-nm-thick TiO2 in the graphene-semiconductor junction, respectively, corresponding to lowering the effective barrier height by 0.24 and 0.12 eV. Furthermore, we propose a graphene-induced gap state model that simultaneously considers the graphene's modulation by a gate bias and the effect of the high-κ insertion.

    Original languageEnglish
    Article number7317745
    Pages (from-to)4-7
    Number of pages4
    JournalIEEE Electron Device Letters
    Volume37
    Issue number1
    DOIs
    Publication statusPublished - 2016 Jan

    Bibliographical note

    Publisher Copyright:
    © 2015 IEEE.

    Keywords

    • GS junction
    • Schottky
    • graphene
    • high-κ

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

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