Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer

Kyeong Jae Byeon; Ki Yeon Yang; Heon Lee

doi:10.1016/j.mee.2007.01.102

Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO₂ layer

Kyeong Jae Byeon, Ki Yeon Yang, Heon Lee

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO₂ film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO₂ film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO₂ layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin.

Original language	English
Pages (from-to)	1003-1006
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.102
Publication status	Published - 2007 May

Keywords

Anti-sticking coating
Nanoimprint lithography
Nickel template
Silane based SAM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1016/j.mee.2007.01.102

Cite this

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title = "Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer",

abstract = "Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO2 film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO2 film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO2 layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin.",

keywords = "Anti-sticking coating, Nanoimprint lithography, Nickel template, Silane based SAM",

author = "Byeon, {Kyeong Jae} and Yang, {Ki Yeon} and Heon Lee",

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doi = "10.1016/j.mee.2007.01.102",

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journal = "Microelectronic Engineering",

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AU - Byeon, Kyeong Jae

AU - Yang, Ki Yeon

AU - Lee, Heon

PY - 2007/5

Y1 - 2007/5

N2 - Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO2 film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO2 film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO2 layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin.

AB - Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO2 film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO2 film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO2 layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin.

KW - Anti-sticking coating

KW - Nanoimprint lithography

KW - Nickel template

KW - Silane based SAM

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