Abstract
We studied the thermal stability of new amorphous ZrAl-based magnetic tunnel junctions (MTJs) with a ZrAl-oxide barrier replacing the Ta layers traditionally used for the under and capping layers. The MTJs were compared with similar conventional MTJs (Ta-based MTJ with Al-oxide). After annealing at various temperatures up to 450°C, the ZrAl-based MTJs still had a significant tunnel magnetoresistance signal of nearly 21%. The thermal stability of amorphous ZrAl-based and conventional Ta-based MTJs differs dramatically, mainly because of the different microstructural evolution. The noncrystalline ZrAl-alloy film had superior surface uniformity and an induced microstructure that resisted interdiffusion, with dense, equiaxed grains making up the upper stacks' films. By contrast, the conventional Ta-based MTJ had a broad columnar structure with less dense boundaries, which act as a source of interdiffusion, resulting in barrier deformation at elevated temperatures.
| Original language | English |
|---|---|
| Pages (from-to) | 2667-2669 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 41 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2005 Oct |
Bibliographical note
Funding Information:This work was supported by the Korean Ministry of Science and Technology under National Research Laboratory program, the Korea Research Foundation under Grant KRF-2004-005-C00068, and the Basic Research Program of the KOSEF under Grant R-01-2005-000-11188-0.
Keywords
- Amorphous ZrAl alloy
- Magnetic tunnel junction
- Thermal stability
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering