Thickness dependent ferroelectric properties of BSTO thin films deposited by RF magnetron sputtering

Engineering & Materials Science

• Magnetron sputtering 100%
• Ferroelectric materials 99%
• Thin films 70%
• Permittivity 53%
• Dielectric losses 27%
• Dielectric properties 26%
• Annealing 21%
• Perovskite 14%
• Tensile strain 13%
• Electrodes 8%
• Substrates 7%

Chemical Compounds

• Magnetron Sputtering 86%
• Liquid Film 36%
• Dielectric Constant 29%
• Dielectric Loss 24%
• Permittivity 23%
• Dielectric Property 21%
• Pm3m 16%
• Simple Cubic Crystal System 16%
• Strain 14%
• Dielectric Material 9%
• Annealing 8%
• Space Group 7%
• Behavior as Electrode 5%
• Reduction 4%

Physics & Astronomy

• magnetron sputtering 62%
• thin films 38%
• permittivity 37%
• dielectric loss 20%
• dielectric properties 17%
• annealing 12%
• contraction 10%
• perovskites 8%
• electrodes 6%