Various metal capping (MC) layer were deposited on the amorphous SiZnSnO channel layer to ensure high electrical properties. In addition, it was confirmed that the electrical characteristics change depending on the material of each MC layer. This effect is analyzed as a phenomenon which is caused by the difference between the work function of the MC layer and the work function of the channel layer. When the work function of the MC layer is smaller than the work function of the channel layer, the electrons are injected into the channel layer from the MC layer, so that higher electrical characteristics can be obtained. As a result, the electrical characteristics can be controlled by a simple change of the MC layer, and the logic circuits such as NOT, NAND, and NOR can be simply fabricated.
|Title of host publication
|AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices
|Subtitle of host publication
|TFT Technologies and FPD Materials, Proceedings
|Institute of Electrical and Electronics Engineers Inc.
|Published - 2018 Aug 15
|25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018 - Kyoto, Japan
Duration: 2018 Jul 3 → 2018 Jul 6
|AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings
|25th International Workshop on Active-Matrix Flatpanel Displays and Devices - TFT Technologies and FPD Materials, AM-FPD 2018
|18/7/3 → 18/7/6
Bibliographical noteFunding Information:
This work was supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) and the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea (No.20172010104940). The Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1D1A3B06033837).
© 2018 FTFMD.
ASJC Scopus subject areas
- Media Technology
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics