Thin film phosphor prepared by physical vapor deposition for field emission display application

Yun Hi Lee, Man Ho Song, Byeong Kwon Ju, Dong Ki Shin, Myung Hwan Oh

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


We fabricated very thin ZnO:Zn film using rf magnetron sputtering and ZnS:Pr.Ce layer by electron-beam evaporation for color field emission display application. Also, in order to investigate the influence of surface conductive layer onto the phosphor films upon the emission characteristics, we prepared the layered structures having an additional conducting layer of 2-6-nm-thick Sn-doped In2O3 film. Cathodoluminescence spectrum of sputtered ZnO:Zn (250 nm) film shows two broad peaks centered around 540 and 600 nm, respectively. The spectra characteristics of ZnS:Pr,Ce,F films show white spectrum that covered a whole visible wavelength. One of the effects of an additional surface layer of indium tin oxide on ZnO and ZnS phosphor is the shift of spectrum toward shorter wavelength as well as low voltage emission, as compared to our phosphor film without the surface conductive layer.

Original languageEnglish
Pages (from-to)512-515
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 1997

Bibliographical note

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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