Type conversion of boron-doped silicon wafers by 3-MeV proton irradiation

Keyphrases

• Wafer 100%
• Silicon Wafer 100%
• Proton Irradiation 100%
• MeV Protons 100%
• Czochralski 100%
• Type Conversion 100%
• Boron-doped Silicon 100%
• Floating Zone 100%
• Room Temperature 50%
• Hall Measurement 50%
• Current Measurement 50%
• Si Wafer 50%
• Current-voltage 50%
• P-n Junction 50%
• Boron Doping 50%
• P-type Si 50%
• Resistance Measurement 50%
• I-V Measurement 50%
• Dose-ranging 50%
• Electron Beam Induced Current 50%
• Spreading Resistance 50%

Material Science

• Silicon Wafer 100%
• Boron 100%
• Proton Irradiation 100%