Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region

Jihun Ryu; Wook Choi; Eun Seok Jeon; Chang Woo Song; Chang Soo Han

doi:10.1016/j.snb.2019.02.090

Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region

Jihun Ryu, Wook Choi, Eun Seok Jeon, Chang Woo Song, Chang Soo Han

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

In this paper, we analyze particle translocation through micropores with low aspect ratios. Micropores with diameters of 11.6 μm and various lengths (1000 nm, 500 nm, 100 nm, and 50 nm) are fabricated on a silicon nitride membrane via laser machining at a low aspect ratio. After measuring the translocation signals of a 5.4- μm particle, we find that the effects of the access region become more significant than those of the pore region for detecting signals at low aspect ratios. To clarify this mechanism, finite element method simulation and mathematical analysis are performed and we describe the relationship between an inhomogeneous electric field and the critical role of the access region. Additionally, we detect the translocation signal of a double particle. As a result, we achieve a decrease in translocation speed and improve signal detection at an ultralow aspect ratio, demonstrating the potential to detect the shapes of small particles directly.

Original language	English
Pages (from-to)	454-459
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	288
DOIs	https://doi.org/10.1016/j.snb.2019.02.090
Publication status	Published - 2019 Jun 1

Bibliographical note

Funding Information:
This work was supported by the Basic Science Research Program (NRF-2018R1A2A1A05023556) and ERC Program (NRF-2016M3D1A1952991) through the National Research Foundation, which is funded by the Ministry of Science and ICT, Korea.

Publisher Copyright:
© 2019 Elsevier B.V.

Keywords

Access resistance
Micropore sensor
Particle translocation
Ultralow-aspect-ratio

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2019.02.090

Cite this

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title = "Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region",

abstract = "In this paper, we analyze particle translocation through micropores with low aspect ratios. Micropores with diameters of 11.6 μm and various lengths (1000 nm, 500 nm, 100 nm, and 50 nm) are fabricated on a silicon nitride membrane via laser machining at a low aspect ratio. After measuring the translocation signals of a 5.4- μm particle, we find that the effects of the access region become more significant than those of the pore region for detecting signals at low aspect ratios. To clarify this mechanism, finite element method simulation and mathematical analysis are performed and we describe the relationship between an inhomogeneous electric field and the critical role of the access region. Additionally, we detect the translocation signal of a double particle. As a result, we achieve a decrease in translocation speed and improve signal detection at an ultralow aspect ratio, demonstrating the potential to detect the shapes of small particles directly.",

keywords = "Access resistance, Micropore sensor, Particle translocation, Ultralow-aspect-ratio",

author = "Jihun Ryu and Wook Choi and Jeon, {Eun Seok} and Song, {Chang Woo} and Han, {Chang Soo}",

note = "Funding Information: This work was supported by the Basic Science Research Program (NRF-2018R1A2A1A05023556) and ERC Program (NRF-2016M3D1A1952991) through the National Research Foundation, which is funded by the Ministry of Science and ICT, Korea. Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",

year = "2019",

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doi = "10.1016/j.snb.2019.02.090",

language = "English",

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T2 - Critical role of the access region

AU - Ryu, Jihun

AU - Choi, Wook

AU - Jeon, Eun Seok

AU - Song, Chang Woo

AU - Han, Chang Soo

N1 - Funding Information: This work was supported by the Basic Science Research Program (NRF-2018R1A2A1A05023556) and ERC Program (NRF-2016M3D1A1952991) through the National Research Foundation, which is funded by the Ministry of Science and ICT, Korea. Publisher Copyright: © 2019 Elsevier B.V.

PY - 2019/6/1

Y1 - 2019/6/1

N2 - In this paper, we analyze particle translocation through micropores with low aspect ratios. Micropores with diameters of 11.6 μm and various lengths (1000 nm, 500 nm, 100 nm, and 50 nm) are fabricated on a silicon nitride membrane via laser machining at a low aspect ratio. After measuring the translocation signals of a 5.4- μm particle, we find that the effects of the access region become more significant than those of the pore region for detecting signals at low aspect ratios. To clarify this mechanism, finite element method simulation and mathematical analysis are performed and we describe the relationship between an inhomogeneous electric field and the critical role of the access region. Additionally, we detect the translocation signal of a double particle. As a result, we achieve a decrease in translocation speed and improve signal detection at an ultralow aspect ratio, demonstrating the potential to detect the shapes of small particles directly.

AB - In this paper, we analyze particle translocation through micropores with low aspect ratios. Micropores with diameters of 11.6 μm and various lengths (1000 nm, 500 nm, 100 nm, and 50 nm) are fabricated on a silicon nitride membrane via laser machining at a low aspect ratio. After measuring the translocation signals of a 5.4- μm particle, we find that the effects of the access region become more significant than those of the pore region for detecting signals at low aspect ratios. To clarify this mechanism, finite element method simulation and mathematical analysis are performed and we describe the relationship between an inhomogeneous electric field and the critical role of the access region. Additionally, we detect the translocation signal of a double particle. As a result, we achieve a decrease in translocation speed and improve signal detection at an ultralow aspect ratio, demonstrating the potential to detect the shapes of small particles directly.

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JO - Sensors and Actuators, B: Chemical

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ER -

Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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