UV nanoimprint using flexible polymer template and substrate

Sung Hoon Hong; Jae Yeon Hwang; Heon Lee; Hee Chul Lee; Kyung Woo Choi

doi:10.1016/j.mee.2008.09.044

UV nanoimprint using flexible polymer template and substrate

Sung Hoon Hong, Jae Yeon Hwang, Heon Lee, Hee Chul Lee, Kyung Woo Choi

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.

Original language	English
Pages (from-to)	295-298
Number of pages	4
Journal	Microelectronic Engineering
Volume	86
Issue number	3
DOIs	https://doi.org/10.1016/j.mee.2008.09.044
Publication status	Published - 2009 Mar

Bibliographical note

Funding Information:
This work is supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-003-D00266) and the Ministry of Knowledge Economy (MKE) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

Keywords

DLC coating
Flexible polymer template
Hot embossing
UV nanoimprint lithography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2008.09.044

Cite this

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title = "UV nanoimprint using flexible polymer template and substrate",

abstract = "Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.",

keywords = "DLC coating, Flexible polymer template, Hot embossing, UV nanoimprint lithography",

author = "Hong, {Sung Hoon} and Hwang, {Jae Yeon} and Heon Lee and Lee, {Hee Chul} and Choi, {Kyung Woo}",

note = "Funding Information: This work is supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-003-D00266) and the Ministry of Knowledge Economy (MKE) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.",

year = "2009",

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doi = "10.1016/j.mee.2008.09.044",

language = "English",

volume = "86",

pages = "295--298",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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AU - Hong, Sung Hoon

AU - Hwang, Jae Yeon

AU - Lee, Heon

AU - Lee, Hee Chul

AU - Choi, Kyung Woo

N1 - Funding Information: This work is supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-003-D00266) and the Ministry of Knowledge Economy (MKE) and Korea Industrial Technology Foundation (KOTEF) through the Human Resource Training Project for Strategic Technology.

PY - 2009/3

Y1 - 2009/3

N2 - Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.

AB - Nano to micro-sized patterns were formed on a flexible polymer substrate using a flexible UV imprint stamp. A 6 in. diameter flexible UV nanoimprint template was fabricated using PVC hot embossing and DLC coating. Using the UV nanoimprint process with the DLC coated PVC template, nano to micro-sized patterns were clearly formed on the flexible PET substrate without a residual layer, due to the antistiction properties and high mechanical hardness of the DLC coating. By depositing a Cr layer on the imprinted resist pattern and lifting it off, Cr metal patterns were fabricated on the PET substrate.

KW - DLC coating

KW - Flexible polymer template

KW - Hot embossing

KW - UV nanoimprint lithography

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U2 - 10.1016/j.mee.2008.09.044

DO - 10.1016/j.mee.2008.09.044

M3 - Article

AN - SCOPUS:59049099165

SN - 0167-9317

VL - 86

SP - 295

EP - 298

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 3

ER -

UV nanoimprint using flexible polymer template and substrate

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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