Vacancy-modulated self-rectifying characteristics of NiOx/Al2O3-based nanoscale ReRAM devices

Ji Hwan Lee, Ju Hyun Park, Tukaram D. Dongale, Tae Geun Kim

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)


A vacancy-modulated self-rectifying resistive random access memory (ReRAM) with a Ti/NiOx/Al2O3/Pt structure is proposed in this study. Here, NiOx is used as a resistive switching layer, and Al2O3 is used as a tunnel barrier layer for producing self-rectifying behavior. The tunnel barrier thickness in the NiOx/Al2O3 interfacial region can be increased or decreased according to the movement of oxygen vacancies in the NiOx layer under positive or negative voltages, respectively, thereby leading to self-rectifying resistive switching behavior. As a result, the NiOx/Al2O3-based self-rectifying ReRAM exhibits a low operation current of ∼3 × 10−7 A, large ON/OFF ratio of ∼6 × 103, high rectification ratio of ∼5 × 102, long retention of 105 s, and forming-free and self-compliance characteristics, meeting the next generation ReRAM requirements. The Ti/NiOx/Al2O3/Pt-based self-rectifying structures can pave the way to develop high-density embedded memory applications in the future.

Original languageEnglish
Article number153247
JournalJournal of Alloys and Compounds
Publication statusPublished - 2020 Apr 25

Bibliographical note

Funding Information:
This study was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (No. 2016R1A3B1908249 ).


  • Aluminium oxide
  • Forming-free
  • Nickel oxide
  • ReRAM
  • Self-rectifying
  • Vacancy modulation

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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