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Variation of poly-Si grain structures under thermal annealing and its effect on the performance of TiN/Al2O3/Si3N4/SiO2/poly-Si capacitors

  • Suk Bum Hong
  • , Ju Hyun Park
  • , Tae Ho Lee
  • , Jun Hee Lim
  • , Changhwan Shin
  • , Young Woo Park
  • , Tae Geun Kim*
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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