Abstract
In this study, the periodic nanostructures of various shapes were fabricated using a low-cost, low-power continuous wave laser. The nanostructures can be easily fabricated with a low-cost and simple process using a laser interference lithography technology. In addition, we demonstrated that various shapes such as spherical, hemispherical, and wavy can be easily controlled by adjusting the surface energy of the substrate and process parameters.
| Original language | English |
|---|---|
| Pages (from-to) | 1918-1919 |
| Number of pages | 2 |
| Journal | Digest of Technical Papers - SID International Symposium |
| Volume | 55 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2024 |
| Event | International Symposium, Seminar, and Exhibition, Display Week 2024 - San Jose, United States Duration: 2024 May 12 → 2024 May 17 |
Bibliographical note
Publisher Copyright:© 2024, John Wiley and Sons Inc. All rights reserved.
Keywords
- continuous laser
- Laser Interference Lithography
- low-cost
- low-power
- nanostructure
- periodic-nano patterning
ASJC Scopus subject areas
- General Engineering