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Wafer-scale colloidal lithography based on self-assembly of polystyrene nanospheres and atomic layer deposition
Jeong Rok Oh, Jung Ho Moon, Hoo Keun Park, Jae Hyoung Park, Haegeun Chung, Jinhoo Jeong, Woong Kim, Young Rag Do
Research output: Contribution to journal › Article › peer-review
29
Citations
(Scopus)