Wavelet monitoring of plasma etching

Byungwhan Kim, Won Sun Choi, Myo Teak Lim

    Research output: Contribution to journalArticlepeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2329-2333
    Number of pages5
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume21
    Issue number6
    DOIs
    Publication statusPublished - 2003

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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