Wavelet monitoring of plasma etching

Byungwhan Kim, Won Sun Choi, Myo Teak Lim

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2329-2333
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1617285
Publication status	Published - 2003

ASJC Scopus subject areas

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